Microdeflectometry – SEM like 3D images

Microdeflectometry is an offspring of macroscopic deflectometry. As an off-axis embodiment of the remote sinusoidal pattern is impossible,  the pattern is delivered on-axis via a beam splitter. The pattern is NOT projected onto the object but focused in remote distance, within the depth of field of the microscope. Due to the local slope of the object, the observed fringe pattern displays locally varying phase. From this phase, the local slope can easily be calculated.

Microdeflectometry, principle

In combination with Structured Illumination Microcopy, SEM-like, quantitative 3D images with large depth of field can be generated. The method can be modified for transmission microscopy as well, delivering images similar to Nomarski differential interference contrast.

Z 217     G. Häusler, C. Richter, K.- H. Leitz and M. Knauer. „Microdeflectometry – a novel tool to acquire three-dimensional microtopography with nanometer height resolution”. Optics Letters 33, 4, 396-398, 2008

T 230. pdf    C. Kranitzky, C. Richter, C. Faber, M. C. Knauer, and G. Häusler. “3D-microscopy with large depth of field.“ DGaO-Proceedings 2009, 110^th Annual Meeting of the DGaO, 2009, Brescia, Italy

T 237. pdf   S. Peterhänsel, C. Richter, C. Faber, M. C. Knauer and G. Häusler. „Micro-deflectometry in transmission“ Proceedings of the 110^th Annual Meeting of the DGaO, 2009, Brescia, Italy